Part Name: Vacuum pump
| Robot | Unit | Item Number | Quantity |
|---|---|---|---|
| NEXIA-2500SW | M250ULS200K001 | B-16 | 2 |
| NEXIA-3000S | M300JFE200K000 | B-20 | 1 |
| NEXIA-2000S | M200JJB200KES0 | B-41 | 1 |
| NEXIA-2000SWL(KEBA) | M200ULS2R0N000 | C-16 | 1 |
| EPIK-E-2500D-SM | M250PMS200AKA0 | B-31 | 2 |
| NEXIA-2500S | M200JFE200KES0 | B-40 | 1 |
| NEXIA-1800SW(KEBA) | M130VLS200N000 | B-17 | 1 |
| EPIK-E-2500SW | M200ULS2R0KK00 | B-16 | 1 |
| NEXIA-E-2500S | M250QLA200AES0 | B-41 | 1 |
| NEXIA-E-3000S | M300QLA200AES0 | B-40 | 1 |
| NEXIA-E-3000SW | M300VLF200AE00 | B-15 | 1 |
| NEXIA-1300SW | M130ULS2R0K002 | B-25 | 1 |